摘要 |
Disclosed is a glass substrate holding film body such that?in terms of configuration, a self-adsorption type sheet (32) is bonded to a back plate with a double-faced adhesive sheet (34) therebetween, and that a glass substrate is held by being adsorbed on the self-adsorption type sheet. The double-faced adhesive sheet is composed of a piece of sheet-like base material (38) and adhesive layers (40, 42) provided on both surfaces of the base material. The adhesive layers are provided in such a way that predetermined gaps (B" ", B" ") are formed, respectively, in the same plane of the base material. The gaps provided on both surfaces of the base material do not overlap each other in the lamination direction of the adhesive layers. |