| 发明名称 |
COOLING AND/OR LUBRICATING FLUIDS FOR WAFER PRODUCTION |
| 摘要 |
<p>The invention relates to the use of modified polyglycols for producing cooling and/or lubricating fluids, to novel cooling and/or lubricating fluids, to the use of cooling and/or lubricating fluids for material removal, in particular for cutting wafers, as well as to wafers produced using the cutting fluid.</p> |
| 申请公布号 |
EP2809754(A1) |
申请公布日期 |
2014.12.10 |
| 申请号 |
EP20130703001 |
申请日期 |
2013.02.01 |
| 申请人 |
BASF SE |
发明人 |
SEELMANN-EGGEBERT, HANS-PETER;MAITRO-VOGEL, SOPHIE;REIS-WALTHER, EVA-MARIA;BENTELE, JOACHIM;ÄLVEBORN-JANSSON, LENA |
| 分类号 |
C10M107/34;C10N40/22;H01L21/304 |
主分类号 |
C10M107/34 |
| 代理机构 |
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| 地址 |
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