| 摘要 |
<p>Provided is a multi-layer piezoelectric element in which the amount of the positional displacement can be suppressed even when continuous driving is performed for a long time under high electrical field and high pressure, and which may have a good durability. The laminated piezoelectric element comprises a stacked body in which piezoelectric layers and metal layers are stacked alternately one on another. The metal layers comprise internal electrodes and a low-rigidity metal layer which has rigidity lower than those of the piezoelectric layer and the internal electrode. The low-rigidity metal layer comprises a plurality of metal parts isolated from each other via voids, and a covering layer which covers at least a part of the metal parts.</p> |
