发明名称 半導体装置
摘要 A semiconductor device (200) includes an electric fuse (100) including: an upper layer fuse interconnect (112) formed on a substrate (not shown); a lower layer fuse interconnect (122); and a via (130) which is connected to one end of the upper layer fuse interconnect (112) and connects the upper layer fuse interconnect (112) and the lower layer fuse interconnect (122). The upper fuse interconnect (112) includes a width varying region (118) having a small interconnect width on a side of the one end.
申请公布号 JP5638188(B2) 申请公布日期 2014.12.10
申请号 JP20080268997 申请日期 2008.10.17
申请人 发明人
分类号 H01L21/82;H01L21/3205;H01L21/768;H01L21/822;H01L23/522;H01L27/04 主分类号 H01L21/82
代理机构 代理人
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