发明名称 メタルマスクとメタルマスク部材
摘要 PROBLEM TO BE SOLVED: To provide a metal mask of pseudo slit type, capable of suppressing any twist of a tape part by increasing the length in the longitudinal direction of each aperture when the metal mask is affixed to a frame body by applying tensional force, and suppressing dispersion in the aperture width so as to be small. SOLUTION: A plurality of aperture array parts having an aperture shape provided with a plurality of connection parts 12 across the direction orthogonal to the longitudinal direction of a slit-like aperture 11 at a predetermined pitch P1 are arrayed at the predetermined pitch in the direction orthogonal to the longitudinal direction. Each of the connection parts of each of the aperture array parts is provided evenly on the straight line in the direction orthogonal to the longitudinal direction of each of the aperture array parts at every other aperture array part, and the straight line group in the direction orthogonal to the longitudinal direction of each of the aperture array parts, in which every connection part of the every aperture array part is arrayed, is arranged at the pitch that shows the half of the predetermined pitch. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5636863(B2) 申请公布日期 2014.12.10
申请号 JP20100233377 申请日期 2010.10.18
申请人 发明人
分类号 C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/04
代理机构 代理人
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