Apparatus for laser induced thermal imaging (LITI) and LITI method using the same, as well as fabrication method of a corresponding LITI mask

摘要

A mask for LITI and a LITI method using the same wherein the mask includes patterns arranged in a direction perpendicular to a beam scanning direction and are arranged so that increasingly longer patterns are located towards the edge of the mask than in or near the center, and having center axes aligned to corresponding center axes of image patterns formed on a substrate.