| 摘要 |
<p>The present invention provides a deposition apparatus, which can achieve accurate alignment through a simple configuration, a method for manufacturing an organic light-emitting display by using the same, and the organic light-emitting display device. The deposition apparatus comprises a transfer part and a deposition part. The transfer part circulates and transfers a moving part to which a substrate is detachably attached. The deposition part includes an assembly and a chamber. While the transfer part is transferring the moving part to which the substrate is fixed, the assembly is spaced apart from the substrate by a predetermined distance and deposits a material on the substrate. The deposition assembly includes: a patterning slit sheet; a first stage which supports the patterning slit sheet; and two X motors which are spaced apart from each other on a straight line in the first direction so as to contact the first stage and can move parts of the first stage contacting each position in a second direction intersecting with the first direction and an opposite direction thereof.</p> |
