INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
摘要
<p>An inertial sensor according to the present invention comprises: a flexible part; a weight body connected to the flexible part; and a support part which is connected to the flexible part and supports the weight part in a floating state to be displaced. The flexible part includes an upper piezoresistive body on one surface and a lower piezoresistive body on the other surface to detect the displacement of the weight body.</p>
