JOULE-HEATING EVAPORATING APPARATUS AND THE EVAPORATING METHOD USING THE SAME

摘要

A joule-heating evaporating apparatus according to the present invention includes a plurality of heating electrodes which are arranged in a corresponding target region among a plurality of target regions. The heating electrodes passes through the center of the corresponding target region, is arranged to be separated from an extension line which is vertical to a base substrate, and forms a layer with a uniform thickness on the target region.