| 摘要 |
PROBLEM TO BE SOLVED: To provide a die bonder and a die bonding method having a short tact time and a high alignment accuracy by reducing the impact of vibration generated by conveyance operation or airflow produced by a heat source on an image captured for the purpose of positioning a work or a wafer. SOLUTION: Immediately after stopping the movement of a work or a die, an image pick-up device captures the image of the work or die in a shutter speed sufficiently longer than the fluctuation period (1 wavelength) of the waveform of a vibration before reaching a setting position and sufficiently longer than the wavelength of optical fluctuation due to airflow. An image processing section corrects the position by performing image processing where a blurred image thus captured is used for pattern matching. COPYRIGHT: (C)2012,JPO&INPIT |
