发明名称 インゴットの切断方法
摘要 PROBLEM TO BE SOLVED: To provide an ingot cutting method capable of suppressing a usage amount of a wire in a wire saw. SOLUTION: The ingot cutting method uses a wire saw for cutting the ingot to sequentially cut a plurality of ingots, and executes: a step of cutting one ingot while feeding the wire of the wire saw in one direction; a step of winding back the wire in the other direction by a distance L indicated by following formula (1), with reference to a feeding position of the wire when the wire is departed from the one ingot during the cutting; and a step of bringing the wire in the winded back state into contact with the next ingot and cutting the next ingot while feeding the wire in one direction. 0<L<Xa+Xb ...(1). In the formula (1), the length of a wire diameter reduction area R1 is Xa, and the length of a wire diameter increased area R3 is Xb. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5639858(B2) 申请公布日期 2014.12.10
申请号 JP20100258768 申请日期 2010.11.19
申请人 发明人
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
代理机构 代理人
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