| 摘要 |
The Invention relates to a cathodic sputtering target composition comprising at least a solid electrolyte and an inorganic carbon free polymer and to a method for the manufacturing of cathodic solid sputtering targets using such a composition. The invention also relates to solid sputtering targets obtained by such a method and to their use for the preparation of solid thin films by a sputtering physical vapour deposition process, in particular for the preparation of solid electrolyte thin films inside thin-film batteries. |
