| 摘要 |
PROBLEM TO BE SOLVED: To adequately form an image corresponding to a pattern on the surface of an object OB to be machined when forming the pattern on the surface of a cylindrical tubular object OB to be machined having a very small diameter by the laser beam machining by using a two-dimensional spatial light modulator. SOLUTION: Machining laser beam is applied to the cylindrical tubular object OB to be machined extending in the X-axis direction from a machining head 10 in the Z-axis direction, servo Z-axis direction laser beam is applied in the Z-axis direction from a servo Z-axis direction light head 20, and the servo Y-axis direction laser beam is applied in the Y-axis direction from a servo Y-axis direction light head 30. Deviation of the object OB to be machined in the Y-axis direction is detected according to the position of the projection of the object OB to be machined to be projected on a photo detector 140, and deviation of the object OB to be machined in the Z-axis direction is detected according to the position of the projection of the object OB to be machined to be projected on a photo detector 402. COPYRIGHT: (C)2012,JPO&INPIT |
