发明名称 ビトリファイドボンド超砥粒ホイールおよびそれを用いたウエハの製造方法
摘要 To provide a super abrasive-grain grinding wheel using ceramic binder which exhibits stable grinding performance. A super abrasive-grain grinding wheel using ceramic binder is produced by bonding layers of super abrasive grains 13 containing super abrasive grains 10 bonded with ceramic binders (20, 30), wherein the layers of super abrasive grains 13 contain a first layer of super abrasive grains 11 which comprise super abrasive grains 10 bonded with ceramic binder 20 and a second layer of super abrasive grains 12 formed by aggregating clusters of super abrasive grains that are made by bonding the super abrasive grains with the ceramic binder 30.
申请公布号 JP5640100(B2) 申请公布日期 2014.12.10
申请号 JP20130004598 申请日期 2013.01.15
申请人 发明人
分类号 B24D3/18;H01L21/304 主分类号 B24D3/18
代理机构 代理人
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