プラズマ処理装置、プラズマ処理方法及び記憶媒体,申请号JP20130220923-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	プラズマ処理装置、プラズマ処理方法及び記憶媒体
摘要
申请公布号	JP5638682(B2)	申请公布日期	2014.12.10
申请号	JP20130220923	申请日期	2013.10.24
申请人		发明人
分类号	H01L21/3065;H05H1/46	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Disk device, disk-transporting device, and disk-loading device

Optical scanning lens, optical scanning device and image forming apparatus

INTEGRATED TORSION BAR LIFTGATE

Sheet deskewing with automatically variable differential NIP force sheet driving rollers

Cutting elements of gage row and first inner row of a drill bit

Production of diesel fuel from biorenewable feedstocks

Anti-inflammatory and wound healing effects of lymphoid thymosin beta-4

Electrical connection apparatus capable of resisting repetition of connection and disconnection

Humidity controller apparatus

Flexible compression member for a flexible pneumatic structural element and means for erecting pneumatic element structures

Food processing

Semiconductor laser device and optical pickup apparatus having the device

EFFICIENT WATER FILTERS

Method of manufacturing semiconductor device

Salts of clopidogrel and process for preparation

METHOD, SYSTEM, AND PROGRAM PRODUCT FOR FEEDBACK CONTROL OF A TARGET SYSTEM UTILIZING IMPOSITION OF A PERIODIC MODULATING SIGNAL ONTO A COMMAND SIGNAL

DNA-PK inhibitors

Method and device for producing packing coverings for composite cardboard/plastic packages

Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing