| 发明名称 |
Niobium-complexes and their use in a method for forming a niobium-containing layer on a substrate |
| 摘要 |
<p>A method for forming a niobium-containing layer on a substrate, the method comprising at least the steps of:
a) providing a vapor comprising at least one precursor compound according to the invention;
b) reacting the vapor comprising the at least one compound according to the invention with the substrate, according to an atomic layer deposition process, to form a layer of a niobium-containing complex on at least one surface of said substrate.</p> |
| 申请公布号 |
EP2810950(A1) |
申请公布日期 |
2014.12.10 |
| 申请号 |
EP20130305748 |
申请日期 |
2013.06.04 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
LACHAUD, CHRISTOPHE;CORREIA - ANACLETO, ANTONY;LAHOOTUN, VANINA;ZAUNER, ANDREAS |
| 分类号 |
C07F9/00;H01L21/00;H01L27/00 |
主分类号 |
C07F9/00 |
| 代理机构 |
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