APPARATUS FOR CONTROLLING ROBOT ARM, SUBSTRATE CONVEYING APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD FOR CONTROLLING ROBOT ARM AND COMPUTER READABLE STORAGE MEDIUM

摘要

The present invention reduces vibration during transport by a robot arm. The robot arm control device according to the present invention that controls an operation of a robot arm device which is provided with two or more arm portions and two or more rotating joints for respective rotation of the two or more arm portions is provided with a control unit that controls the rotation of the two or more rotating joints so as to substantially linearly move a tip side of the predetermined arm portion other than the arm portion in a base-most portion and controls the rotation of the two or more rotating joints so that an operation acceleration on the tip side during the substantially linear movement of the tip side of the predetermined arm portion has a result matching a scheduled time progress. In the operation acceleration in the scheduled time progress, a derivative function in which a function is differentiated by time shows a continuous progress with respect to time change in a case where the operation acceleration is a function of time.