APPARATUS FOR REMOVING ELECTRO STATIC

摘要

The present invention provides a soft X-ray neutralizer for vacuum chamber. The soft X-ray neutralizer includes a high voltage generating unit which generates a high voltage for generating soft X-ray; a soft X-ray generating unit which generates a soft X-ray through the high voltage and emits the ray to the outside; a flexible connecting unit which connects the high voltage generating unit and the soft X-ray generating unit and transfers the high voltage to the soft X-ray generating unit; and a fixing unit which is installed in the soft X-ray generating unit and is fixed to a specific installation object.