发明名称 |
Method of preparing photoacid generating monomer |
摘要 |
A method of preparing a monomer comprises reacting a sultone of the formula (I):;wherein each R is independently F, C1-10 alkyl, fluoro-substituted C1-10 alkyl, C1-10 cycloalkyl, or fluoro-substituted C1-10 cycloalkyl, provided that at least one R is F; n is an integer of from 0 to 10, and m is an integer of 1 to 4+2n, with a nucleophile having a polymerizable group. Monomers, including a photoacid-generating monomer, may be prepared by this method. |
申请公布号 |
US8907122(B2) |
申请公布日期 |
2014.12.09 |
申请号 |
US201113339831 |
申请日期 |
2011.12.29 |
申请人 |
Rohm and Haas Electronic Material LLC;Dow Global Technologies LLC |
发明人 |
Coley Suzanne M.;Wilson David R.;Timmers Francis J. |
分类号 |
C07C303/32;C07C381/12;C08F228/00;G03F7/004;G03F7/038;G03F7/039;C08F220/38 |
主分类号 |
C07C303/32 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP |
主权项 |
1. A method of preparing a monomer, comprising:
reacting a sultone of the formula (I): wherein each R is independently F, C1-10 alkyl, fluoro-substituted C1-10 alkyl, C1-10 cycloalkyl, or fluoro-substituted C1-10 cycloalkyl, provided that at least one R is F; n is an integer of from 0 to 10, and m is an integer of 1 to 4+2n, with a nucleophile having a polymerizable group. |
地址 |
Marlborough MA US |