COATING APPARATUS AND METHOD OF CLEANING SEALING UNIT

摘要

The present invention relates to a method of property removing coating liquid attached to a sealing unit that seals a discharge port of a slit nozzle. A coating apparatus according to the embodiment includes: a slit nozzle; a moving mechanism; a sealing unit; a solvent reservoir; and an immersing mechanism. The slit nozzle is provided with a discharge port at a lower side of the slit nozzle, and configured to discharge a coating liquid from the discharge port. The moving mechanism is configured to move the slit nozzle relative to a substrate. The sealing unit is formed to extend along a longitudinal direction of the discharge port, and includes a top surface which is brought into contact with the discharge port to seal the discharge port. The solvent reservoir is configured to retain a solvent. The immersing mechanism is configured to immerse the sealing unit into the solvent retained in the solvent reservoir.