Magnetic head with beveled main pole and spin torque oscillator, method of manufacturing the same, and magnetic recording/reproduction apparatus

摘要

According to one embodiment, a magnetic head manufacturing method includes forming a protective layer on the surfaces of a main magnetic pole layer, a processed spin torque oscillator, and a mask formed on the spin torque oscillator, and further performing ion beam etching on the main magnetic pole layer and the protective layer on the surface of the main magnetic pole layer through the mask such that the protective layer is left behind on the side surfaces of the spin torque oscillator and removed from the surface of the main magnetic pole layer, thereby processing the main magnetic pole layer such that its side surfaces have a shape tapered toward the substrate.

主权项

1. A magnetic head manufacturing method comprising:
forming a main magnetic pole layer on a substrate; forming a spin torque oscillator on the main magnetic pole layer; forming a mask on the spin torque oscillator; processing the spin torque oscillator by performing ion beam etching on the spin torque oscillator through the mask to make a shape tapered in a direction opposite to the main magnetic pole when viewed from an air bearing surface side; forming a protective layer on surfaces of the main magnetic pole layer, the processed spin torque oscillator, and the mask formed on the spin torque oscillator; further performing ion beam etching on the main magnetic pole layer and the protective layer on the surface of the main magnetic pole layer through the mask such that the protective layer is left behind on side surfaces of the spin torque oscillator and removed from the surface of the main magnetic pole layer, thereby processing the main magnetic pole layer such that side surfaces thereof have a shape tapered toward the substrate; filling an insulating material on the side surface of the main magnetic pole, the surface of the protective layer, and the surface of the substrate; and forming a write shield on the spin torque oscillator, wherein a width W1 of a boundary line between the main magnetic pole and the spin torque oscillator is larger than a width W2 of a boundary line between the spin torque oscillator and the write shield.