Product of polysiloxane condensation

摘要

Provided is a condensation reaction product solution which is particularly suitable for filling a trench formed on a substrate having a narrow width and a high aspect ratio. The condensation reaction product solution has a long pot life, superior trench-filling when used for trench-filling, and a low cure shrinkage, an excellent crack resistance and a HF resistance when cured and converted into silicon oxide. The condensation reaction product solution comprises (I) a condensation reaction product obtained by condensation reaction from a condensation component comprising (i) 40% by mass or more and 99% by mass or less in equivalent of condensate of polysiloxane compound derived from silane compounds represented by the general formula (1): R1nSiX14-n (wherein n is an integer of 0 to 3, R1 is hydrogen atom or a C1-10 hydrocarbon group, and X1 is a halogen atom, a C1-6 alkoxy group or acetoxy group) and (ii) 1% by mass or more and 60% by mass or less of silica particles, and (II) a solvent, wherein the silane compounds represented by the general formula (1) are two or more types of silane compounds comprising a tetrafunctional silane compound which corresponds to the case of n=0 in the general formula (1) and a trifunctional silane compound which corresponds to the case of n=1 in the general formula (1).

主权项

1. A condensation reaction product solution comprising:
(I) a condensation reaction product obtained by condensation reaction from a condensation component containing at least (i) 40% by mass or more and 99% by mass or less in equivalent of condensate of a polysiloxane compound which is a polycondensate of silane compounds represented by the following general formula (1):
R1nSiX14-n  (1){wherein n is an integer of 0 to 3, R1 is hydrogen atom or a C1-10 hydrocarbon group, X1 is a halogen atom, a C1-6 alkoxy group or acetoxy group}; and (ii) 1% by mass or more and 60% by mass or less of silica particles; and
(II) a solvent;
wherein said silane compounds represented by the general formula (1) are composed of two or more types of silane compounds comprising at least a tetrafunctional silane compound which corresponds to the case of n =0 in the general formula (1) and a trifunctional silane compound which corresponds to the case of n =1 in the general formula (1), andwherein in 29Si NMR analysis, the peak intensity (A) of total tetrafunctional siloxane components in said condensation reaction product to the peak intensity (B) of components corresponding to siloxane bonding number of 4 in said condensation reaction product satisfy the following relationship:
{(B)/(A)}≧0.50, wherein the weight average molecular weight of said condensation reaction product is 1,000 or more and 20,000 or less, and wherein an average primary particle diameter of said silica particles is 1 nm or more and 120 nm or less.