| 发明名称 | Vibration isolation module and substrate processing system | ||
| 摘要 | The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module. | ||
| 申请公布号 | US8905369(B2) | 申请公布日期 | 2014.12.09 |
| 申请号 | US201214241109 | 申请日期 | 2012.09.10 |
| 申请人 | Mapper Lithography IP B.V. | 发明人 | Peijster Jerry Johannes Martinus;Ellenbroek Rogier Martin Lambert;De Boer Guido |
| 分类号 | H01J37/20;F16F15/04;F16F15/10;H01J37/317;H01J37/02;G03F7/20;F16F15/08 | 主分类号 | H01J37/20 |
| 代理机构 | Hoyng Monegier LLP | 代理人 | Hoyng Monegier LLP ;Owen David P. |
| 主权项 | 1. Module for isolating vibrations from a substrate processing apparatus such as a lithographic apparatus or inspection apparatus, the module comprising: a support frame; an intermediate body connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body; and a support body for accommodating the substrate processing apparatus, the support body being connected to the intermediate body by means of at least one pendulum rod such that the support body is a hanging body; and wherein the at least one pendulum rod is provided with a flexure point. | ||
| 地址 | Delft NL | ||