Hybrid electrostatic lens with increased natural frequency

摘要

A composite electrostatic rod may include a body comprising a length L and cross sectional area A. The body may include an outer portion comprising a first material, and a core comprising a second material different than the first material and surrounded by the outer portion, wherein a natural frequency of the composite electrostatic rod is greater than that of a graphite rod having the length L and cross sectional area A.

主权项

1. A composite electrostatic lens for controlling an ion beam for ion implantation rod, comprising:
first and second electrostatic rods defining a gap for transmitting the ion beam therebetween; wherein at least one of the first and second electrostatic rods comprises a body having a length L and cross sectional area A, the body comprising:
an outer portion comprising an upper shell and a separate lower shell that are fastened together, the upper and lower shells formed of a first material; anda core formed from a second material different than the first material and surrounded by the outer portion, wherein a natural frequency of the electrostatic rod is greater than that of a graphite rod having the length L and cross sectional area A.