Antireflective coating composition and process thereof

摘要

The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1):
-A-B-C-  (1)
where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3)
;
where R1 is C1-C4alkyl and R2 is C1-C4alkyl.
;The invention further relates to a process for forming an image using the composition.

主权项

1. A high carbon content antireflective coating composition comprising a crosslinker and a crosslinkable polymer, where the crosslinkable polymer comprises a unit represented by structure (1)
-A-B-C-  (1) where A has structure (4) further where Ar is anthracene, B has a structure (2), and C is a hydroxybiphenyl of structure (3) where R1 is C1-C4alkyl and R2 is C1-C4alkyl and further wherein, Ar may be unsubstituted or substituted with one or more organo constituents, chosen from the group consisting of alkyl, aryl, substituted aryl, alkylaryl, and haloalkyls, hydroxyl, amino, and aminoalkyl;and further were the composition after coating, and baking at 400° C. for 120 seconds, has a carbon content that is greater than 80 weight%.