Donor substrate, method for fabricating the donor substrate, and method for forming transfer pattern using the donor substrate

摘要

A donor substrate may include a base layer, a light-to-heat conversion layer disposed on the base layer, a buffer layer disposed on the light-to-heat conversion layer and including a composite layer of titanium dioxide and polytetrafluoroethylene, and a transfer layer disposed on the buffer layer. The buffer layer may be disposed between the transfer layer and the light-to-heat conversion layer. The buffer layer may be cleaned by incident light to preserve or improve its hydrophobicity. Accordingly, the buffer layer can be easily separated from the transfer layer. Advantageously, when (a portion of) the transfer layer is transferred onto a target substrate, unwanted material transfer may be prevented.

主权项

1. A donor substrate comprising:
a base layer; a light-to-heat conversion layer disposed on the base layer; a buffer layer disposed on the light-to-heat conversion layer and including a composite layer of titanium dioxide and polytetrafluoroethylene; and a transfer layer disposed on the buffer layer, wherein the buffer layer is disposed between the transfer layer and the light-to-heat conversion layer.