Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument

摘要

A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.

主权项

1. A pyroelectric detector comprising:
a pyroelectric detection element; a support member supporting the pyroelectric detection element; a first gas barrier layer covering the pyroelectric detection element and the support member and being configured to prevent reducing gas from coming into the pyroelectric detection element and the support member; the pyroelectric detection element including
a capacitor having an electrode and a pyroelectric body and being configured on the support member,a second gas barrier layer covering at least a side of the capacitor and being configured to prevent a reducing gas from coming into the capacitor,an insulator layer covering the second gas barrier and including a contact hole,an electrode wiring layer being configured on the insulator layer and connected to the capacitor via a plug by which the contact hole is filled.