Organic light-emitting display device and thin film deposition apparatus for manufacturing the same

摘要

A thin film deposition apparatus that can be used to manufacture large substrates on a mass scale and that improves manufacturing yield, and an organic light-emitting display device manufactured using the thin film deposition apparatus. The organic light-emitting display device includes: a substrate including a plurality of sub-deposition areas arranged parallel to each other; at least one thin film transistor formed on the substrate, the at least one thin film transistor comprising a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes contacting the semiconductor active layer; a plurality of pixel electrodes formed on the thin film transistor; a plurality of organic layers formed on each of the pixel electrodes; and a counter electrode formed on the organic layers, wherein the plurality of organic layers lie in each of the sub-deposition areas and have a larger shadow zone the further a distance from a center of the corresponding deposition area.

主权项

1. An organic light-emitting display device comprising:
a substrate including a plurality of deposition areas that are parallel to each other; at least one thin film transistor formed in each of the plurality of deposition areas on the substrate, the at least one thin film transistor comprising a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes contacting the semiconductor active layer; a plurality of pixel electrodes formed on the at least one thin film transistor; a plurality of organic layers formed on the pixel electrodes, each of the organic layers comprising a shadow zone; and a counter electrode formed on the organic layers, wherein a size of the shadow zone of each of the organic layers increases as a distance from a center of a corresponding one of the deposition areas to the organic layer increases, and wherein one of the plurality of organic layers formed on the substrate at the center of the corresponding one of the deposition areas has the smallest shadow zone among the organic layers in the corresponding deposition area.