Neighbor-aware edge fragment adjustment for optical proximity correction

摘要

Aspects of the invention relate to techniques for applying edge fragment correlation information to optical proximity correction. Neighbor-aware edge adjustment values for the edge fragments are computed based on edge placement error values and edge fragment correlation information. The computation comprises: selecting a group of edge fragments around a center edge fragment, calculating preliminary neighbor-aware edge adjustment values based on the edge placement error values and the edge fragment correlation information for the group of edge fragments, storing the preliminary neighbor-aware edge fragment adjustment value for the center edge fragment, and repeating the selecting, the calculating and the storing with each of the edge fragments being the center edge fragment. The computed neighbor-aware edge adjustment values are combined with conventional edge adjustment values and the edge fragments are adjusted accordingly. The process may be repeated for a number of times.

主权项

1. A method, executed by at least one processor of a computer, comprising:
determining edge placement error values for edge fragments in a layout design based on simulation; and computing neighbor-aware edge adjustment values for the edge fragments based on the edge placement error values and edge fragment correlation information, wherein the computing comprises: selecting a group of edge fragments from the edge fragments, the group of edge fragments comprising a center edge fragment and edge fragments neighboring the center edge fragment determined based on a predetermined condition, calculating preliminary neighbor-aware edge adjustment values based on the edge placement error values for the group of edge fragments and the edge fragment correlation information for the group of edge fragments, storing the preliminary neighbor-aware edge adjustment values for the center edge fragment or a plurality of edge fragments as the neighbor-aware edge adjustment values for the center edge fragment or the plurality of edge fragments, the plurality of edge fragments being a subgroup of edge fragments in the group of edge fragments that include the center edge fragment, and repeating the selecting, the calculating and the storing for different groups of edge fragments.