Tuning fork configured to generate flexural vibration in reverse phase to the contour vibration of first and second vibrating bodies

摘要

A vibrator includes a base substrate, a tuning fork type vibrating body, a first vibrating body, a second vibrating body, a first extraction electrode at the one vibration arm portion, a second extraction electrode at the other vibration arm portion, and an input/output port at the base portion. The input/output port is configured to input/output an electric signal to/from each of the first extraction electrode, the second extraction electrode, and the excitation electrodes of the vibration arm portions. The tuning fork type vibrating body is configured to generate a flexural vibration in reverse phase to the contour vibration of the first and second vibrating bodies, so as to absorb the contour vibration of the first and second vibrating bodies.

主权项

1. A vibrator comprising:
a base substrate; a tuning fork type vibrating body including a base portion, a pair of vibration arm portions having a pair of first excitation electrodes, the base portion being supported by the base substrate, the pair of vibration arm portions extending from the base portion away from each other, each of the pair of vibration arm portions including a piezoelectric body, the pair of first excitation electrodes sandwiching each of the vibration arm portions; a first vibrating body including a vibration plate having a piezoelectric thin film and a pair of second excitation electrodes, the piezoelectric thin film being connected to one vibration arm portion of the pair of vibration arm portions at an outer circumference of the piezoelectric thin film, the pair of second excitation electrodes sandwiching the piezoelectric thin film in a thickness direction, the first vibrating body being configured to generate a contour vibration by performing expansion and contraction between a center and the outer circumference of the piezoelectric thin film; a second vibrating body including a vibration plate with a piezoelectric thin film and a pair of third excitation electrodes, the piezoelectric thin film being connected to the other vibration arm portion of the pair of vibration arm portions at an outer circumference of the piezoelectric thin film, the pair of third excitation electrodes sandwiching the piezoelectric thin film in a thickness direction, the second vibrating body being configured to generate a contour vibration in phase with the contour vibration of the first vibrating body; a first extraction electrode disposed at the one vibration arm portion, the first extraction electrode being connected to the second excitation electrode of the first vibrating body; a second extraction electrode disposed at the other vibration arm portion, the second extraction electrode being connected to the third excitation electrode of the second vibrating body; and an input/output port disposed at the base portion and configured to input/output an electric signal to/from each of the first extraction electrode, the second extraction electrode, and the first excitation electrodes of the pair of vibration arm portions, wherein the tuning fork type vibrating body is configured to generate a flexural vibration in reverse phase to the contour vibration of the first and second vibrating bodies, so as to absorb the contour vibration of the first and second vibrating bodies.