GRADED MULTILAYER MIRROR AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to an inclined multi-layer thin film mirror and a method of manufacturing the same. According to the present invention, a method of manufacturing a multi-layer thin film mirror includes preparing a substrate to form a multi-layer thin film; placing a mask on an upper portion of the substrate; jetting an ion beam or a radiation beam to a target substance; and passing a reaction substance reacted with the ion beam or the radiation beam from the target substance through a slit portion of the mask to deposit the reaction substance on the substrate, wherein the mask includes a slit portion through which the reaction substance from the target substance is passed; and a space portion formed at a gap with the slit portion, and the size of the slit portion progressively becomes larger from the left to the right or the right to the left.