Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes

摘要

A microgyroscope is used to determine rotational motions about at least one of three perpendicular spatial axes x, y, and z. The microgyroscope has a substrate (1) on which multiple masses (2x, 2y, 9) which oscillate parallel to the plane of the substrate (1) in an x-y plane are situated. Some of the oscillating masses (2x, 2y) are attached to the substrate (1) by means of springs and anchorings. Drive elements (4a, 4b) are used to maintain oscillating vibrations of the masses (2x, 2y, 9) which are subjected to Coriolis forces when the substrate (1) rotates about any given spatial axis. Sensor elements detect the deflections of the masses (2x, 2y, 9) due to the Coriolis forces generated. Some of the oscillating masses are x masses (2x) which are also deflectable along the z axis perpendicular to the substrate (1), by means of which they are able to detect yaw rates about the x axis, and/or some of the oscillating masses are y masses (2y) which are also deflectable along the z axis perpendicular to the substrate (1), by means of which they are able to detect yaw rates about the y axis, and/or others of the oscillating masses are z masses (9) which are also deflectable in the x-y plane, but perpendicular to their respective drive direction, by means of which they are able to detect yaw rates about the z axis.

主权项

1. A microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes x, y, and z, comprising:
a substrate on which a plurality of masses are situated, the plurality of masses oscillating in parallel to a plane of the substrate in an x-y plane, a subset of oscillating masses in the plurality of masses being attached to the substrate by springs and anchoring; drive elements for maintaining the oscillating vibrations for the plurality of masses which are subjected to Coriolis force when the substrate rotates about one of the three perpendicular spatial axes x, y, and z; sensor elements for detecting at least one deflection of the plurality of masses due to the Coriolis force; wherein a central anchoring is situated on the substrate, and the plurality of masses are arranged around the central anchoring; wherein the subset of oscillating masses further comprises at least one mass selected from x masses and y masses, the x masses being deflectable along the z axis perpendicular to the substrate to detect yaw rates about the x axis, the y masses being also deflectable along the z axis perpendicular to the substrate to detect yaw rates about the y axis; wherein the plurality of masses further comprises z masses that, within the x-y plane, are deflectable in a direction that is perpendicular to a drive direction to detect yaw rates about the z axis; wherein the x and y masses are coupled to the central anchoring, and the z masses are coupled to at least one of the x masses and y masses; and wherein the x and y masses are supported on the substrate and configured to be linearly and tangentially driven about the central anchoring.