发明名称 CHEMICAL VAPOR DEPOSITION APPARATUS
摘要 <p>According to an embodiment of the present invention, a chemical vapor deposition apparatus comprises: a body unit which has a plurality of accommodating grooves on one surface and a supporting rod on the other surface and is arranged in a response chamber; pocket units rotationally arranged in each accommodation groove; an operation gas supply unit which supplies operation gas into the accommodation grooves through the supporting rod to rotate the pocket unit; and a heating unit which supplies heat to the operation gas flowing in the operation gas supply unit by heating the operation gas supply unit.</p>
申请公布号 KR20140140281(A) 申请公布日期 2014.12.09
申请号 KR20130060910 申请日期 2013.05.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JUN WOO;KIM, CHOO HO;JI, WON SOO;HUR, IN HOE
分类号 C23C16/44;C23C16/452 主分类号 C23C16/44
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