Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition

摘要

A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I):;
wherein
M is a metal selected from Groups 3 through 12 of the Periodic Table;R1 and R2 are each independently H or C1-C6 alkyl; andR3 is H or C1-C8 alkyl.

主权项

1. A compound having formula (I):wherein
M is a metal selected from Groups 2 to 12 of the Periodic Table; R1 and R2 are each independently H or C1-C6 alkyl; and R3 is H or H or C1-C8 alkyl.