| 摘要 |
Parts of a substrate case can be separated and cleaned inside a tank body while making the cleaning solution evenly reach it. A substrate case C which is provided with a base Mb and shell Ms and holds a substrate inside is cleaned in a state with no substrate. Provision is made of a cleaning tank 40 which holds and cleans the parts of the base Mb and shell Ms of the substrate case C in a separated stated, provision is made of a conveyance mechanism which conveys the parts of the substrate case with the cleaning tank 40, and the cleaning tank 40 is provided with a tank body 42 and a lid 43 which can be opened and closed and is provided with a rotating plate 44 which is provided at a bottom part of the tank body 42 to be able to rotate about an axis in the vertical direction, a plurality of base support rods 46 which are provided standing up at the rotating plate 44 and which support parts of the outer edge of the base Mb at a predetermined height position, and a plurality of shell support rods 47 which are provided standing up at the rotating plate 44 and which support parts of the outer edge of the shell Ms at a predetermined height position different from the base support rods 46. |
