| 摘要 |
PROBLEM TO BE SOLVED: To heighten the efficiency of optical axis temporary adjustment work by parallel processing with temporary adjustment of multiple connection parts, and to provide an inexpensive and high reliability optical axis adjustment apparatus.SOLUTION: The optical axis adjustment apparatus comprises: a first optical device 21 for reflecting part of incident light from a light source 20 and emitting part of the light; a second optical device 22 for throwing back part of the light emitted from the first optical device 21 to the first optical device; micro-movement stages 23, 24 for changing the relative positions of the second optical device and the first optical device; a reflected light receiver 25 for measuring the intensity of the light returned to the incident light direction of the first optical device; a reflected light signal processing unit 26 for having a change in the intensity of returned light in the reflected light receiver corresponded to an amount of movement of the micro-movement stages; an optical axis adjustment control unit 28 for calculating, on the basis of the intensity change and the movement amount, the amount of movement of the micro-movement stages as needed for being located at a target position; and a micro-movement stage control unit 27 for moving the micro-movement stages by an amount of movement as needed for being located at the target position. |
