| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate moving part for vapor deposition, an organic layer vapor deposition apparatus with the same, and an organic light emission display unit.SOLUTION: There is provided a substrate moving part for vapor deposition that includes an electrostatic chuck which can have one surface fixed onto a substrate, and a carrier which is coupled to the other surface of the electrostatic chuck so as to move the electrostatic chuck in a first direction, and has a plurality of storage parts formed inside and a reinforcement rib formed on one surface of each storage part. The reinforcement rib is formed on an inner side face of a surface to which the electrostatic chuck is coupled, and respective reinforcement ribs are formed in an X shape; and a plurality of polishing parts extended in the first direction are further formed on a plane to which the electrostatic chuck is coupled by the carrier, and the electrostatic chuck is formed in one body. |
