METHOD FOR FORMING FINE PATTERN

摘要

PROBLEM TO BE SOLVED: To efficiently form a fine pattern having an optional cross-sectional shape.SOLUTION: A method for forming a groove pattern of a diffraction grating, includes: a cross-sectional shape optimization step S401 for obtaining desired optical characteristics based on a simulation of optical characteristics; a processing process optimization step S402 for obtaining a desired cross-sectional shape based on a simulation of a processing process; a processing step S403 for processing a substrate based on the processing process optimized by the optimization step S402; a measurement step S404 for measuring a cross-sectional shape of the substrate processed by the processing step S403; and an evaluation step S405 for evaluating optical characteristics of the processed substrate.