发明名称 |
THIN-FILM TRANSISTOR, DISPLAY DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film transistor capable of obtaining good transistor characteristics.SOLUTION: The thin-film transistor includes: a substrate; a first barrier film which is formed on the substrate and has barrier properties against impurities from the substrate side and reducibility to an oxide semiconductor layer; a second barrier film which is formed in a selective region on the first barrier film and has barrier properties against hydrogen; the oxide semiconductor layer which includes a first portion formed on the second barrier film and functioning as an active layer, and a second portion formed on the first barrier film and having a lower electric resistance value than the first portion; a gate electrode formed on the first portion of the oxide semiconductor layer via a gate insulating film; and a source electrode or a drain electrode electrically connected to the second portion of the oxide semiconductor layer. |
申请公布号 |
JP2014229814(A) |
申请公布日期 |
2014.12.08 |
申请号 |
JP20130109773 |
申请日期 |
2013.05.24 |
申请人 |
SONY CORP |
发明人 |
KATO YUICHI |
分类号 |
H01L21/336;G02F1/1368;G09F9/30;H01L29/786;H01L51/50 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|