| 摘要 |
PROBLEM TO BE SOLVED: To make work of a visual field search in an electron microscope efficient and easy by presenting an interrelation between observation images to a user with a high recognition performance while considering an observation situation of each portion of one specimen.SOLUTION: An electron microscope 200 comprises: a storage section 213 for storing various data; and an arithmetic section 201 which executes processing for acquiring observation images of a specimen 231 and an observation condition during imaging from an imaging mechanism 220 and storing the observation images in the storage section 213 as history images correspondingly to the observation condition, processing for displaying on a display section 211 an observation image of an observation portion of the specimen 231 at a present time point, a predetermined number of history images of the specimen 231 in the storage section 213 and a wide area image as one of the history images of the specimen 231 in the storage section 213, and display processing of a predetermined graphic indicating relative positions, ranges and directions in the wide area image based on the observation conditions regarding the observation image being displayed and the predetermined number of history images being displayed, in the wide area image displayed on the display section 211. |
