发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To form a tunnel field-effect transistor at a low cost.SOLUTION: A semiconductor device 100a includes a first material (an oxide semiconductor film 104) and a second material (a surface of a substrate 102). The first material (the oxide semiconductor film 104) comprises an oxide semiconductor. The second material (the surface of the substrate 102) comprises a semiconductor. In the semiconductor device 100a, a heterojunction is formed from the first material (the oxide semiconductor film 104) and the second material (the surface of the substrate 102). In the semiconductor device 100a, a tunnel barrier, where a carrier tunnels between a conduction band and a valence band of the first material (the oxide semiconductor film 104) and the second material (the surface of the substrate 102), is formed.</p>
申请公布号 JP2014229713(A) 申请公布日期 2014.12.08
申请号 JP20130107436 申请日期 2013.05.21
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 TANABE AKITO
分类号 H01L29/66;H01L21/336;H01L29/78;H01L29/786 主分类号 H01L29/66
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