MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF MONOSILANE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method of a monosilane capable of realizing a high monosilane yield by using a minimal raw ingredient without entailing a yield loss attributed to an excessive reaction and of continuously preparing a monosilane having a high stability.SOLUTION: The provided apparatus includes: a reaction column 1 for preparing a monosilane by using a hydrogenated silicon chloride as a raw ingredient and a tertiary aliphatic hydrocarbon-substituted amine and/or the hydrochloride of a tertiary aliphatic hydrocarbon-substituted amine as a catalyst; a separator 2 in which a monosilane is extracted from a reaction product supplied from the upper stage 1c of the reaction column 1 and separated from a condensate liquid consisting of other components; an evaporation tank 3 in which a concentrated liquid is prepared by heating a bottom liquid supplied from the lower stage 1b of the reaction column 1 and then evaporating the hydrogenated silicon chloride included within the bottom liquid; and a catalyst regeneration tank 5 in which a mixture obtained by adding a portion of the raw ingredient and/or a portion of the condensate liquid to the concentrated liquid is heated so as to reactivate the catalyst included within the condensate liquid and to prepare a regenerant including the catalyst. A circulatory system targeting the catalyst is formed by the supply, into the reaction column 1, of the regenerant supplied from the catalyst regeneration tank 5.