| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical conductive unit so as to meet requirements incurred by development of electronic appliances, and a manufacturing method thereof.SOLUTION: A vertical conductive unit 2 comprises an insulating layer 21 including a connecting via 211, a first conductor 22, a second conductor 23 and a third conductor 24 and the insulating layer 21 contains photosensitive polyimide. The glass transition temperature of the photosensitive polyimide is lower than about 200°C. The method of manufacturing the vertical conductive unit 2 includes following steps. Namely, the first conductor 22 is provided, the insulating layer 21 is formed thereon, and the first conductor 22 is brought into contact with a lower surface of the insulating layer 21. The connecting via 211 is formed by performing photosensitive imaging on the insulating layer 21 in a predetermined position of the connecting via 211. The third conductor 24 and the first conductor 22 are brought into contact within the connecting via 211. The second conductor 23 is formed to bring an upper surface of the insulating layer 21 into contact with the second conductor 23, and the third conductor 24 and the second conductor 23 are brought into contact, thereby manufacturing the vertical conductive unit 2. |
