| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma light source capable of supplying a proper amount of plasma medium by preventing a medium holding part from being thermally damaged.SOLUTION: A plasma light source includes a pair of coaxial electrodes which generate plasma and confine plasma therebetween. The coaxial electrode has a central electrode 12, and an external electrode provided so as to surround the outer periphery of the central electrode 12. A medium holding part 18 is provided on the side surface of the central electrode 12. The medium holding part 18 has a recess 19. The recess 19 holds a larger amount of plasma medium 6 than a surface 18a of the outer periphery thereof, and the recess is irradiated with a laser beam 42 of a laser device. |
