发明名称 VACUUM PROCESSING APPARATUS, AND VIBRATION CONTROL DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To damp vibration of a vibration control object disposed in a vacuum tank.SOLUTION: The fixing part 20 of a vibration control device 5 is fixed on the vibration control object in the vacuum tank, and the vibration control device 5 damps vibration of the vibration control object by a mass part 21, a spring part 22, and a damper part 23. Viscoelastic liquid is not provided in the damper part 23, and either one of a coil 35 and a magnet 36 disposed in the coil 35 is fixed to the mass part 21 and the other is fixed to the fixing part 20. When the mass part 21 vibrates, they are relatively vibrated, an induced electromotive voltage (V) is thereby generated with the vibration, an induction current flowing in the coil 35 forms a magnetic field, and force preventing relative movement is applied between the coil 35 and the magnet 36. Thereby, vibration of the mass part 21 is damped by the damping coefficient (c) of the damper part 23, the mass (m) of the mass part 21, and the spring constant (k) of the spring part 22.</p>
申请公布号 JP2014229760(A) 申请公布日期 2014.12.08
申请号 JP20130108688 申请日期 2013.05.23
申请人 ULVAC JAPAN LTD 发明人 NAKAO HIROTOSHI;SAKAUCHI YUYA;MACHIYA KENJI
分类号 H01L21/68;F16F15/02 主分类号 H01L21/68
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