| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator capable of suppressing positional deviation of a laser beam based on heat deformation of an electrode, and to provide a laser processing device employing the same.SOLUTION: A flow rate adjusting device 25 sends a flow rate control signal 27 to a mass flow controller 29 on the basis of a measurement signal 23 from a thermoelectric couple 21 and adjusts a flow rate flowing here, such that a temperature of an upper electrode 1 is controlled to a predetermined value Ta. Similarly, a flow rate adjusting device 26 sends a flow rate control signal 28 to a mass flow controller 30 on the basis of a measurement signal 24 from a thermoelectric couple 22 and adjusts a flow rate flowing here, such that a temperature of a lower electrode 2 is controlled to a predetermined value Tb. The flow rate adjusting devices 25 and 26 are set in such a manner that the temperature Ta of the upper electrode 1 and the temperature Tb of the lower electrode 2 become equal to each other, and the temperatures Ta and Tb of the upper electrode 1 and the lower electrode 2 after a warming-up operation are controlled constant, respectively. |
