| 摘要 |
Provided is a film forming apparatus capable of improving material use efficiency of film forming material. A film forming apparatus (1) includes a diffusion width adjusting unit (50) adjusting a diffusion width of a film forming material particle (Mb) from an evaporation source (2). The diffusion width adjusting unit (50) can increase the diffusion width in a long longitudinal direction (D2) orthogonal to a short longitudinal direction (D1) better than the diffusion width in the short longitudinal direction (D1). In other words, the diffusion width adjusting unit (50) can decrease the diffusion width in the short longitudinal direction (D1) better than the diffusion width in the long longitudinal direction (D2). Accordingly, the diffusion width in the short longitudinal direction (D1) may be decreased to suppress the film forming material particle (Mb) from being attached to a side wall (10i) of a vacuum chamber (10) facing the short longitudinal direction (D1) and a side wall (10h), thereby reducing the film forming material particle (Mb) attached to a wall surface of the vacuum chamber (10), thus improving material use efficiency of film forming material (Ma). |
