THREE-DIMENSIONAL INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional interferometer capable of three-dimensionally spatially obtaining a refractive index distribution of a specimen without rotating the specimen.SOLUTION: A scan optical system causes a laser beam outputted from an interferometer body to scan so as to describe a prescribed circle while reflecting the laser beam, and a reflecting mirror is rotated along the prescribed circle and is rotated synchronously with the scanning laser beam and further reflects the scanning laser beam toward a specimen. A turning-back mirror is rotated along the prescribed circle and is rotated synchronously with the scanning laser beam and further regularly reflects light resulting from transmission through the specimen of the laser beam reflected by the reflecting mirror. Return light returning via the turning-back mirror, the reflecting mirror, and the scan optical system and reference light are made to interfere with each other to measure a phase distribution of return wavefronts in the case that the reflecting mirror and the turning-back mirror exist in respective angular positions.