| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control valve which enables its response time to be shortened by dissolving the excess operation of a diaphragm spacer performed after the valve reaches a closed state.SOLUTION: The flow control valve includes: an annular valve seat 115; a diaphragm 116 comprised of a thin plate-like elastic body having a fixed outer peripheral part; and a diaphragm spacer 117 positioned on a side opposite from the valve seat 115 with the diaphragm 116 interposed between the diaphragm spacer 117 and the valve seat 115. The valve seat 115, the diaphragm 116 and the diaphragm spacer 117 are arranged on the same axis. The annular valve seat 115 has an inclined surface 123 inclined on the inner periphery side in the top part of the annular valve seat. The diaphragm 116 is displaced in the direction of the valve seat 115 by the pressing force of the diaphragm spacer 117, so that the inclined surface 123 of the top part of the valve seat 115 and the diaphragm 116 abuts on each other without a space. |
