| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a decompression drying device capable of preventing impurity from adhering to a coating film during decompression drying compared with a conventional one, and a decompression drying method using the same.SOLUTION: A drying object W is placed in a chamber 3, the drying object W is covered, and a box body 4 is arranged so as to bring a peripheral end surface 40 into tight contact with an inner bottom surface 30. At the driving time of a pump 6, internal space 21 surrounding an inner surface of the box body 4 and internal space 20 of the chamber 3 surrounding an outside surface of the box body 4 are alternately switched between a blocked state and a communicating state. During the communicating state, an internal pressure in the internal space 21 is decompressed following the internal pressure in the internal space 20, and the drying object W is dried.</p> |
